Patent Assignment
Reel/Frame 057011/0022
Assignment of Assignor's Interest
Recorded: 2021-07-28
Pages: 3
Assignors
CUI, LINYING
Executed: 2021-06-04
ROGERS, JAMES
Executed: 2021-06-04
DHINDSA, RAJINDER
Executed: 2021-06-18
RAMASWAMY, KARTIK
Executed: 2021-06-04
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Method and Apparatus to Reduce Feature Charging in Plasma Processing Chamber