Patent Assignment
Reel/Frame 057039/0839
Assignment of Assignor's Interest
Recorded: 2021-07-30
Pages: 8
Assignors
BLOMBERG, TOM E.
Executed: 2018-06-20
ZHU, CHIYU
Executed: 2018-09-12
TUOMINEN, MARKO
Executed: 2018-09-12
HAUKKA, SUVI
Executed: 2018-09-07
SHARMA, VARUN
Executed: 2018-09-07
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Thermal Atomic Layer Etching Processes