Patent Assignment
Reel/Frame 057060/0335
Assignment of Assignor's Interest
Recorded: 2021-08-03
Pages: 3
Assignors
WU, SHENG-YING
Executed: 2021-08-02
LIN, MING-HSIEN
Executed: 2021-05-04
WANG, PO-WEI
Executed: 2021-06-28
LU, HSIAO-FENG
Executed: 2021-04-27
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
NO. 8, LI-HSIN ROAD 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Physical Vapor Deposition (Pvd) System and Method of Processing Target