Patent Assignment
Reel/Frame 057063/0905
Assignment of Assignor's Interest
Recorded: 2021-08-03
Pages: 3
Assignee
NUFLARE TECHNOLOGY, INC.
8-1, SHINSUGITA-CHO, ISOGO-KU, YOKOHAMA-SHI, KANAGAWA, 235-8522, JAPAN
Covered Property
(1)
Charged Particle Beam Writing Apparatus, Charged Particle Beam Writing Method, and a Non-Transitory Computer-Readable Storage Medium