Assignment of Assignor's Interest

Recorded: 2021-08-03 Pages: 6

Assignor

HIRAYAMA, MASAKI

Executed: 2021-05-19

Assignees

TOKYO ELECTRON LIMITED

3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN

TOHOKU UNIVERSITY

2-1-1, KATAHIRA, AOBA-KU, SENDAI-SHI, MIYAGI, 9808577, JAPAN

Covered Property (1)

Plasma Processing Apparatus and Plasma Processing Method

Application: 17/299,626 →

Publication: US 2022/0020574