Patent Assignment
Reel/Frame 057084/0659
Assignment of Assignor's Interest
Recorded: 2021-08-04
Pages: 3
Assignee
KABUSHIKI KAISHA YASKAWA DENKI
2-1, KUROSAKI-SHIROISHI, YAHATANISHI-KU, KITAKYUSHU-SHI, FUKUOKA, 806-0004, JAPAN
Covered Property
(1)
Allignment and Transport of Substrate and Focus Ring