Patent Assignment
Reel/Frame 057087/0730
Assignment of Assignor's Interest
Recorded: 2021-08-05
Pages: 7
Assignor
KUSUNOKI, ATSUKI
Executed: 2021-07-30
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Power Supply Method