Patent Assignment
Reel/Frame 057094/0895
Assignment of Assignor's Interest
Recorded: 2021-08-05
Pages: 4
Assignors
SU, HUAN-CHIEH
Executed: 2020-12-24
YOU, JIA-CHUAN
Executed: 2021-01-15
CHUANG, CHENG-CHI
Executed: 2020-12-23
WANG, CHIH-HAO
Executed: 2021-01-03
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSING RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Self-Aligned Air Spacers and Methods for Forming