Patent Assignment
Reel/Frame 057137/0056
Assignment of Assignor's Interest
Recorded: 2021-08-10
Pages: 3
Assignor
TANAKA, KOKI
Executed: 2021-08-04
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etching Method and Plasma Etching Apparatus