Patent Assignment
Reel/Frame 057141/0023
Assignment of Assignor's Interest
Recorded: 2021-08-10
Pages: 8
Assignors
IWAI, TOSHIKI
Executed: 2021-04-05
KOMAKI, TAKAMITSU
Executed: 2021-06-29
TAKI, TOMOKAZU
Executed: 2021-04-05
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Position Measurement Apparatus, Overlay Inspection Apparatus, Position Measurement Method, Imprint Apparatus, and Article Manufacturing Method