Patent Assignment
Reel/Frame 057162/0606
Assignment of Assignor's Interest
Recorded: 2021-08-12
Pages: 4
Assignors
ILLEMANN, CHRISTIAN
Executed: 2021-07-20
MALE, MATHIAS
Executed: 2021-07-20
KUENLE, MATTHIAS
Executed: 2021-07-19
FIEDLER, OLAF
Executed: 2021-07-19
HUBER, THOMAS
Executed: 2021-07-22
Assignee
INFINEON TECHNOLOGIES AG
AM CAMPEON 1-15, NEUBIBERG, 85579, GERMANY
Covered Property
(1)
Substrate Processing Chamber and Process Gas Flow Deflector for Use in the Processing Chamber