Patent Assignment
Reel/Frame 057177/0549
Change of Name
Recorded: 2021-08-11
Pages: 3
Assignor
KLA-TENCOR CORPORATION
Executed: 2019-06-19
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Systems and Methods for Metrology with Layer-Specific Illumination Spectra
Patent:
11,852,590 →
Application:
16/552,107 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.