Patent Assignment
Reel/Frame 057191/0860
Assignment of Assignor's Interest
Recorded: 2021-08-16
Pages: 5
Assignors
LIN, CHIA TAI
Executed: 2014-01-16
LIN, YIH-ANN
Executed: 2014-01-16
CHANG, AN-SHENG
Executed: 2014-01-16
CHEN, RYAN CHIA-JEN
Executed: 2014-01-16
CHEN, CHAO-CHENG
Executed: 2014-01-16
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method of Making a Finfet Device Including a Step of Recessing a Subset of the Fins