Patent Assignment
Reel/Frame 057211/0348
Assignment of Assignor's Interest
Recorded: 2021-08-18
Pages: 3
Assignors
CEKLI, HAKKI ERGÜN
Executed: 2015-04-07
LIU, XING LAN
Executed: 2015-04-03
VAN DER SANDEN, STEFAN CORNELIS THEODORUS
Executed: 2015-04-08
VAN HAREN, RICHARD JOHANNES FRANCISCUS
Executed: 2015-04-03
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Lithographic Method and Lithographic Apparatus