Patent Assignment
Reel/Frame 057227/0773
Assignment of Assignor's Interest
Recorded: 2021-08-19
Pages: 6
Assignors
NEFZI, MARWÈNE
Executed: 2021-07-25
ZWEERING, RALF
Executed: 2021-07-25
GRUNER, TORALF
Executed: 2021-07-12
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Compensation of Creep Effects in an Imaging Device