Patent Assignment
Reel/Frame 057243/0650
Assignment of Assignor's Interest
Recorded: 2021-08-20
Pages: 3
Assignors
CHEN, PIN-WEN
Executed: 2021-08-03
HSU, YUAN-CHEN
Executed: 2021-08-06
CHANG, KEN-YU
Executed: 2021-08-08
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Chemical Vapor Deposition for Uniform Tungsten Growth