Patent Assignment
Reel/Frame 057248/0447
Assignment of Assignor's Interest
Recorded: 2021-08-22
Pages: 8
Assignors
REN, MAOHUA
Executed: 2021-08-12
PAI, YUAN-CHI
Executed: 2021-08-12
TAN, WEN YI
Executed: 2021-08-12
Assignee
UNITED SEMICONDUCTOR (XIAMEN) CO., LTD.
NO.899 WAN JIA CHUN ROAD, XIAMEN XIANG'AN, XIAMEN, FUJIAN, CHINA
Covered Property
(1)
Reticle Thermal Expansion Calibration Method Capable of Improving Sub-Recipe