Patent Assignment
Reel/Frame 057259/0071
Assignment of Assignor's Interest
Recorded: 2021-08-23
Pages: 3
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method for Scanning a Sample by a Charged Particle Beam System