Patent Assignment
Reel/Frame 057259/0784
Assignment of Assignor's Interest
Recorded: 2021-08-23
Pages: 3
Assignors
FUJIWARA, NAOKI
Executed: 2021-08-16
OHATA, MITSUNORI
Executed: 2021-08-16
TAKEUCHI, TAKAHIRO
Executed: 2021-08-16
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method