Patent Assignment
Reel/Frame 057306/0004
Assignment of Assignor's Interest
Recorded: 2021-08-27
Pages: 3
Assignors
ISHII, TAKAYUKI
Executed: 2021-08-25
NAGASEKI, KAZUYA
Executed: 2021-08-26
SAITO, MICHISHIGE
Executed: 2021-08-25
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Film Forming Apparatus and Method for Manufacturing Part Having Film Containing Silicon