Patent Assignment
Reel/Frame 057310/0738
Assignment of Assignor's Interest
Recorded: 2021-08-27
Pages: 4
Assignors
CHIU, U-TING
Executed: 2021-08-03
CHOU, CHUN-CHENG
Executed: 2021-08-03
WANG, CHI-SHIN
Executed: 2021-08-03
LIN, CHUN-NENG
Executed: 2021-08-13
YEH, MING-HSI
Executed: 2021-08-03
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
8, LI-HSIN RD. 6 HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Oxidation to Mitigate Dry Etch and/or Wet Etch Fluorine Residue