Patent Assignment
Reel/Frame 057319/0442
Assignment of Assignor's Interest
Recorded: 2021-08-27
Pages: 5
Assignors
HSIEH, CHIEH
Executed: 2021-04-17
CHEN, TAI-YU
Executed: 2021-04-17
HSU, HUNG-JUNG
Executed: 2021-05-16
LIN, CHO-YING
Executed: 2021-04-19
CHIEN, SHANG-CHIEH
Executed: 2021-05-17
CHEN, LI-JUI
Executed: 2021-04-19
LIU, HENG-HSIN
Executed: 2021-04-18
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method and Apparatus for Mitigating Contamination