Patent Assignment
Reel/Frame 057338/0249
Assignment of Assignor's Interest
Recorded: 2021-08-31
Pages: 5
Assignor
KODAMA, TOSHIAKI
Executed: 2021-08-19
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Substrate Processing System and State Monitoring Method