Patent Assignment
Reel/Frame 057357/0816
Assignment of Assignor's Interest
Recorded: 2021-09-01
Pages: 5
Assignor
MASE, TAKAHISA
Executed: 2021-08-19
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Apparatus for Heating Substrate and Method Thereof