Patent Assignment
Reel/Frame 057398/0808
Assignment of Assignor's Interest
Recorded: 2021-09-07
Pages: 4
Assignor
MARUMOTO, HIROSHI
Executed: 2021-09-06
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus