Patent Assignment
Reel/Frame 057418/0572
Assignment of Assignor's Interest
Recorded: 2021-09-09
Pages: 3
Assignors
DEMURA, KENSUKE
Executed: 2021-08-17
MATSUSHIMA, DAISUKE
Executed: 2021-08-17
KAMIYA, MASAYA
Executed: 2021-08-17
Assignee
SHIBAURA MECHATRONICS CORPORATION
5-1 KASAMA 2-CHOME, SAKAE-KU, YOKOHAMA-SHI, KANAGAWA, 247-8610, JAPAN
Covered Property
(1)
Substrate Processing Apparatus