Patent Assignment
Reel/Frame 057419/0931
Assignment of Assignor's Interest
Recorded: 2021-09-09
Pages: 4
Assignors
TANAKA, KOKI
Executed: 2021-09-03
NAGAI, RYU
Executed: 2021-09-03
ORUI, TAKATOSHI
Executed: 2021-09-03
SUDA, RYUTARO
Executed: 2021-09-03
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME,, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etching Method and Plasma Processing Apparatus