Patent Assignment
Reel/Frame 057444/0624
Assignment of Assignor's Interest
Recorded: 2021-09-10
Pages: 3
Assignors
CHENG, ANHAO
Executed: 2021-01-15
KUO, FANG-TING
Executed: 2021-01-18
CHEN, YEN-YU
Executed: 2021-01-18
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Partial Metal Grain Size Control to Improve Cmp Loading Effect