Patent Assignment
Reel/Frame 057474/0819
Assignment of Assignor's Interest
Recorded: 2021-09-14
Pages: 8
Assignors
SAIJO, TOSHIAKI
Executed: 2021-09-01
ABE, JUN
Executed: 2021-09-03
SHOJI, SHOGO
Executed: 2021-09-01
KATO, JUNYA
Executed: 2021-09-14
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method