Patent Assignment
Reel/Frame 057487/0524
Assignment of Assignor's Interest
Recorded: 2021-09-15
Pages: 6
Assignors
SHINOHARA, TOMOYUKI
Executed: 2021-08-11
OKADA, YOSHIFUMI
Executed: 2021-08-11
OKITA, NOBUAKI
Executed: 2021-08-11
KATO, HIROSHI
Executed: 2021-08-12
SHINOHARA, TAKASHI
Executed: 2021-08-11
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Cleaning Device, Substrate Processing Apparatus and Substrate Cleaning Method
Application:
17/475,720 →
Publication:
US 2022/0093420