Patent Assignment
Reel/Frame 057495/0853
Assignment of Assignor's Interest
Recorded: 2021-09-15
Pages: 4
Assignors
CHOU, CHIH-WEI
Executed: 2021-01-18
LIN, SHENG-YUAN
Executed: 2021-01-25
CHI, YUAN-HSIN
Executed: 2021-02-04
CHOU, YIN-TUN
Executed: 2021-01-19
WANG, HUNG-CHIH
Executed: 2021-01-18
LIU, YU-CHI
Executed: 2021-01-18
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO.8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK,, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Semiconductor Apparatus for Deposition Process
Application:
17/460,318 →
Publication:
US 2023/0065818