Patent Assignment
Reel/Frame 057516/0554
Assignment of Assignor's Interest
Recorded: 2021-09-17
Pages: 4
Assignors
AMIKURA, NORIHIKO
Executed: 2021-09-09
OSADA, HIDEYUKI
Executed: 2021-09-09
NANASAKI, GENICHI
Executed: 2021-09-09
KAISE, SEIICHI
Executed: 2021-09-09
KITA, MASATOMO
Executed: 2021-09-09
TAKIZAWA, TAKASHI
Executed: 2021-09-14
TAKAHASHI, EIJI
Executed: 2021-09-13
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Purge Gas Control Method, and Vacuum Transfer Chamber Cleaning Method