Patent Assignment
Reel/Frame 057531/0545
Assignment of Assignor's Interest
Recorded: 2021-09-20
Pages: 6
Assignors
OH, SEJIN
Executed: 2021-06-30
BYUN, IKSU
Executed: 2021-06-30
EARMME, TAEMIN
Executed: 2021-06-30
SUN, JONGWOO
Executed: 2021-06-30
HAN, JEWOO
Executed: 2021-06-30
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Plasma Processing Apparatus and Semiconductor Device Manufacturing Method Using the Same