Patent Assignment
Reel/Frame 057542/0051
Assignment of Assignor's Interest
Recorded: 2021-09-21
Pages: 3
Assignors
CHOU, CHIA CHENG
Executed: 2021-09-14
KO, CHUNG-CHI
Executed: 2021-09-17
LEE, TZE-LIANG
Executed: 2021-09-14
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Reducing Oxidation by Etching Sacrificial and Protection Layer Separately