Patent Assignment
Reel/Frame 057542/0227
Assignment of Assignor's Interest
Recorded: 2021-09-21
Pages: 3
Assignors
KUMAR, SURAJIT
Executed: 2021-08-30
SOUNDARARAJAN, HARI
Executed: 2021-09-13
CHEN, HUI
Executed: 2021-08-30
CHANG, SHOU-SUNG
Executed: 2021-09-17
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Apparatus and Method for Cmp Temperature Control