Patent Assignment
Reel/Frame 057571/0505
Assignment of Assignor's Interest
Recorded: 2021-09-23
Pages: 4
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Imaging Optical Arrangement to Image an Object Illuminated by X-Rays