Patent Assignment
Reel/Frame 057587/0339
Assignment of Assignor's Interest
Recorded: 2021-09-24
Pages: 3
Assignee
NUFLARE TECHNOLOGY, INC.
8-1, SHINSUGITA-CHO, ISOGO-KU, YOKOHAMA-SHI, KANAGAWA, 235-8522, JAPAN
Covered Property
(1)
Multiple Charged Particle Beam Writing Apparatus and Multiple Charged Particle Beam Writing Method