Patent Assignment
Reel/Frame 057590/0927
Assignment of Assignor's Interest
Recorded: 2021-09-24
Pages: 6
Assignors
HATAKEYAMA, JUN
Executed: 2021-09-06
NAGATA, TAKESHI
Executed: 2021-09-06
LIN, CHUANWEN
Executed: 2021-09-06
KIKUCHI, SHUN
Executed: 2021-09-06
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Positive Resist Composition and Patterning Process