Patent Assignment
Reel/Frame 057590/0944
Assignment of Assignor's Interest
Recorded: 2021-09-24
Pages: 6
Assignors
OHASHI, MASAKI
Executed: 2021-08-16
KATAYAMA, KAZUHIRO
Executed: 2021-08-16
FUKUSHIMA, MASAHIRO
Executed: 2021-08-16
KIKUCHI, SHUN
Executed: 2021-08-16
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Molecular Resist Composition and Patterning Process