Assignment of Assignor's Interest

Recorded: 2021-09-24 Pages: 26

Assignors

HAYASHIHARA, HIDEMOTO

Executed: 2021-09-07

YASHIKI, KAYOKO

Executed: 2021-09-06

ASAI, KAZUHIDE

Executed: 2021-09-06

YAMAMOTO, KAZUYOSHI

Executed: 2021-09-06

Assignee

KOKUSAI ELECTRIC CORPORATION

3-4, KANDAKAJI-CHO, CHIYODA-KU, TOKYO, 101-0045, JAPAN

Covered Property (1)

Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Recording Medium

Patent: 11,387,152 →

Application: 17/484,101 →