Patent Assignment
Reel/Frame 057603/0183
Assignment of Assignor's Interest
Recorded: 2021-09-27
Pages: 4
Assignors
XIE, RUILONG
Executed: 2021-09-24
FROUGIER, JULIEN
Executed: 2021-09-27
CHENG, KANGGUO
Executed: 2021-09-24
PARK, CHANRO
Executed: 2021-09-24
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Semiconductor Device with Airgap Spacer Formation from Backside of Wafer