Patent Assignment
Reel/Frame 057604/0914
Assignment of Assignor's Interest
Recorded: 2021-09-27
Pages: 9
Assignors
SHIBASAKI, KENTA
Executed: 2021-09-08
INADA, HIROICHI
Executed: 2021-09-22
SHIMMURA, SATOSHI
Executed: 2021-09-08
TAKAYANAGI, KOJI
Executed: 2021-09-08
YADA, KENJI
Executed: 2021-09-08
SEKI, SHINICHI
Executed: 2021-09-09
TERAMOTO, AKIHIRO
Executed: 2021-09-08
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Solution Treatment Apparatus and Cleaning Method