Patent Assignment
Reel/Frame 057610/0667
Assignment of Assignor's Interest
Recorded: 2021-09-27
Pages: 14
Assignors
MORIKAWA, KATSUHIRO
Executed: 2021-09-24
AKIMOTO, MASAMI
Executed: 2021-09-20
IWASHITA, MITSUAKI
Executed: 2021-09-17
KANEKO, SATOSHI
Executed: 2021-09-14
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method