Patent Assignment
Reel/Frame 057613/0206
Assignment of Assignor's Interest
Recorded: 2021-09-27
Pages: 3
Assignors
JUNG, SOONWOOK
Executed: 2021-09-27
SCHATZ, KENNETH D.
Executed: 2021-09-27
CHO, HUNKEE
Executed: 2021-09-27
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Model-Based Characterization of Plasmas in Semiconductor Processing Systems