Patent Assignment
Reel/Frame 057624/0283
Assignment of Assignor's Interest
Recorded: 2021-09-28
Pages: 3
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Deposition System and Method