Patent Assignment
Reel/Frame 057627/0409
Assignment of Assignor's Interest
Recorded: 2021-09-28
Pages: 5
Assignors
WANG, MEILIANG
Executed: 2021-09-14
LEI, XINJIAN
Executed: 2021-08-06
RAO, MADHUKAR B.
Executed: 2021-07-21
Assignee
VERSUM MATERIALS US, LLC
8555 SOUTH RIVER PARKWAY, TEMPE, ARIZONA, 85284
Covered Property
(1)
Composition for High Temperature Atomic Layer Deposition of High Quality Silicon Oxide Thin Films