Patent Assignment
Reel/Frame 057646/0091
Assignment of Assignor's Interest
Recorded: 2021-09-29
Pages: 10
Assignors
KAMATA, EIKI
Executed: 2021-09-24
SATO, MIKIO
Executed: 2021-09-16
IKEDA, TARO
Executed: 2021-09-16
YAMAMOTO, NOBUHIKO
Executed: 2021-09-16
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Method and Plasma Processing Apparatus