Patent Assignment
Reel/Frame 057657/0652
Assignment of Assignor's Interest
Recorded: 2021-09-30
Pages: 5
Assignors
PARK, CHANRO
Executed: 2021-09-29
MIGNOT, YANN
Executed: 2021-09-29
VINCENT, DANIEL J.
Executed: 2021-09-29
FAN, SU CHEN
Executed: 2021-09-30
WASKIEWICZ, CHRISTOPHER J.
Executed: 2021-09-29
CHEN, HSUEH-CHUNG
Executed: 2021-09-29
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Hard Mask Removal Without Damaging Top Epitaxial Layer