IP Library › Assignment 057668/0779
Patent Assignment
Reel/Frame 057668/0779

Assignment of Assignor's Interest

Recorded: 2021-10-01 Pages: 3
Assignors
KREUZER, JUSTIN LLOYD
Executed: 2019-04-17
LIN, YUXIANG
Executed: 2019-04-17
SOBOLEV, KIRILL URIEVICH
Executed: 2019-04-17
Assignee
ASML HOLDING N.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property (1)
Sensor Apparatus and Method for Lithographic Measurements
Application: 17/600,174 →
Publication: US 2022/0179331