Patent Assignment
Reel/Frame 057702/0583
Assignment of Assignor's Interest
Recorded: 2021-10-05
Pages: 5
Assignors
LIU, ZECHENG
Executed: 2021-09-15
PORE, VILJAMI
Executed: 2021-09-17
TYNELL, TOMMI PAAVO
Executed: 2021-09-15
XU, YU
Executed: 2021-09-15
RUOHO, MIKKO
Executed: 2021-09-15
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Deposition Method and an Apparatus for Depositing a Silicon-Containing Material